Showa Denko Builds Carbonyl Fluoride Plant in Japan

Showa Denko says it has started construction of a 400 m.t./year high-purity carbonyl fluoride (COF2) plant at the company’s site at Aizuwakamatsu, Japan, and it is expected to be completed in July 2011. The gas will be used in the production of liquid crystal display (LCD) panels. High-purity fluoride gases are used for etching thin oxide/nitride films formed on glass substrates in the process of LCD panel production. COF2 involves less disposal cost and lower environmental impact when compared with sulfur hexafluoride (SF6), a typical etching gas, and...

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