SAFC Signs Semiconductor Marketing Agreement

SAFC Hitech has signed an agreement with Advanced Technology Materials, Inc. (ATMI; Danbury, CT) to market the latter's ProE-Vap system to the semiconductor industry. The ProE-Vap system is a solid source vaporizor for Atomic Layer Deposition (ALD) that is used for volume production in high-k/metal gate applications. Both SAFC Hitech and ATMI will sell the system to the mainstream semiconductor market, while SAFC will also market it to compound semiconductor space. The technology helps to vaporize solid materials during semiconductor ALD processes. "ProE-Vap...

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