R&H Opens Immersion Lithography Facility

Rohm and Haas (R&H) says it has opened its $60-million, immersion lithography facility located in the company's Advanced Technology Center at Marlborough, MA. The investment, about $40 million of which was for a 193-nm immersion lithography tool, will support the company’s efforts to develop photoresists and advanced patterning materials, including anti-reflectants and topcoats, for immersion lithography. The 193-nm immersion lithography tool is the same “tool set” used by fabricators including IBM, Intel, and Samsung, says Jim Fahey, v.p...

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