IHS Chemical Week

EnviroTech :: R&D

BASF Extends Electronic Materials R&D

7:15 AM MDT | July 28, 2009 | Alex Scott

BASF says it has extended a joint research program with IMEC (Leuven, Belgium), a nano-electronics research group, to codevelop process chemicals for the semiconductor industry. Financial terms were not disclosed.   The deal involves extending the firms’ existing collaboration on selective cleaning solutions to reduce the number of production steps required for the production of 22-nanometer chips. These solutions are used in the “front-end-of-line” (FEOL), which forms the first part of integrated circuit production where components such as...

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