IHS Chemical Week

EnviroTech :: R&D

Cabot Microelectronics joins Sematech CMP efforts

9:14 AM MST | February 14, 2013 | Rebecca Coons

Semiconductor industry consortium Sematech (Austin, TX) says Cabot Microelectronics has joined its Front End Processes (FEP) program and will collaborate to develop advanced solutions for emerging chemical mechanical planarization (CMP) applications. Paul Kirsch, Sematech's FEP director, says Cabot Microelectronics’ CMP processing solutions complement Sematech's own device and process expertise. "We will work together to develop practical, manufacturable solutions to address the emerging needs of advanced transistor technologies," he adds...

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