UCLA seeks PFC alternative for semiconductor industry

University of California, Los Angeles (UCLA) researchers today announced development of a modeling process designed to simulate atomic-level etching with chemicals that are effective alternatives to widely used perfluorocarbon (PFC) gases. Their work was sponsored by the sponsored by Semiconductor Research Corp. (SRC). The novel approach is expected to enable the identification and evaluation of plasma chemistries for processing emerging memory/logic devices and through-silicon-via (TSV)-enabled technologies for the semiconductor industry. The research will focus...

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