IHS Chemical Week

EnviroTech :: Innovation

Shin-Etsu EUV Project

3:00 PM MDT | September 4, 2009

Semiconductor industry group Sematech (Austin) says Shin-Etsu Chemical has joined its Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE; Albany) and will be collaborating to develop extreme ultraviolet lithography (EUV) photoresists for use at the 22 nm node. Partnering with Shin-Etsu, one of the world’s largest suppliers of semiconductor materials, will accelerate the group’s progress on improving resolution, line-width roughness, and pattern collapse, Sematech...

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